Table-top milliwatt-class extreme ultraviolet high harmonic light source
نویسندگان
چکیده
منابع مشابه
Table top nanopatterning with extreme ultraviolet laser illumination
Patterning with extreme ultraviolet light generated by a compact, bright laser source operating at a wavelength of 46.9 nm is demonstrated using two complementary approaches: multiple beam interferometric lithography and de-magnifying projection. Features with sizes ranging from 370 nm to 60 nm were printed in a few seconds in poly-methyl methacrylate resist. These proof-of-principle experiment...
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ژورنال
عنوان ژورنال: Optica
سال: 2016
ISSN: 2334-2536
DOI: 10.1364/optica.3.001167